Design, identification, and control of a flexure-based XY stage for sast nanoscale positioning
- Creator: Yong, Yuen Kuan , Aphale, Sumeet S. , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2009
Design, analysis and control of a fast nanopositioning stage
- Creator: Yong, Yuen Kuan , Aphale, Sumeet S. , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2008